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Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes

Part of the SpringerBriefs in Applied Sciences and Technology Book Series

DOI: 10.1007/978-4-431-54448-7

ISBN: 978-4-431-54447-0

Publisher: Springer Japan - Springer Journals

Jul 31, 2013

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Chapter 1Introduction of the Electron Microscope

Yoshimura, Nagamitsu

Pages: 1 –10

[This short book mainly describes the ultrahigh-vacuum (UHV) technology in JEOL electron microscopes.]
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Chapter 2History of JEOL Electron Microscopes

Yoshimura, Nagamitsu

Pages: 11 –23

[It could be said that the electron microscope was first invented by Knoll and Ruska (in Germany). Borries and Ruska (Siemens-Halske) developed the 100 kV EM 1932, whose resolution was 10 nm, which would be the first birth of the electron microscope in the world. About 10 years later Hitachi and...
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Chapter 3Accidents and Information, Instructing Us to Improve the Vacuum Systems of JEMs

Yoshimura, Nagamitsu

Pages: 25 –45

[Some accidents sometimes occurred on the vacuum systems of JEMs. We must resolve them as soon as possible. A backstreaming accident occurred on a customer’s EM was, indeed, a most severe one for us, the vacuum engineers of JEOL. In that case the lead-glass window of the viewing chamber got...
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Chapter 4Development of the Evacuation Systems for JEMs

Yoshimura, Nagamitsu

Pages: 47 –79

[The evacuation systems and their pumping devices for JEMs were improved year by year, in order to achieve very clean vacuum. We examined the DP cascade system thoroughly in respect of DP oil-vapor backstreaming, and refined the DP-stack and the system year by year according to experimental...
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Chapter 5Development of JEOL SIPs

Yoshimura, Nagamitsu

Pages: 81 –114

[Philips (Holland) put an EM equipped with a large SIP place on the market early 1980s first in the world. The SIP had three ports for the gun chamber, for the specimen chamber, and for the evacuation pipe to the diffusion pump. The SIP was apparently dedicated for the Philips EMs. We had to...
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Chapter 6Ultrahigh Vacuum Electron Microscopes

Yoshimura, Nagamitsu

Pages: 115 –122

[Field-emission (FE) emitters are indispensable for atomic resolution EMs (ARMs) and analytical EMs (AEMs). Therefore, we had to do best to produce UHV in EMs on market.]

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