Get 20M+ Full-Text Papers For Less Than $1.50/day. Start a 14-Day Trial for You or Your Team.

Learn More →

Experiments and modeling of dual reactive magnetron sputtering using two reactive gases

Experiments and modeling of dual reactive magnetron sputtering using two reactive gases http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films CrossRef

Experiments and modeling of dual reactive magnetron sputtering using two reactive gases

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , Volume 26 (4): 565-570 – Jul 1, 2008
Loading next page...
 
/lp/crossref/experiments-and-modeling-of-dual-reactive-magnetron-sputtering-using-ejgcm7NCYj

References

References for this paper are not available at this time. We will be adding them shortly, thank you for your patience.

Publisher
CrossRef
ISSN
0734-2101
DOI
10.1116/1.2913582
Publisher site
See Article on Publisher Site

Abstract

Journal

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and FilmsCrossRef

Published: Jul 1, 2008

There are no references for this article.