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Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation

Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ... http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Physics Letters CrossRef

Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation

Applied Physics Letters , Volume 85 (25): 6134-6136 – Dec 20, 2004
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Publisher
CrossRef
ISSN
0003-6951
DOI
10.1063/1.1835002
Publisher site
See Article on Publisher Site

Abstract

Journal

Applied Physics LettersCrossRef

Published: Dec 20, 2004

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