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Target compound layer formation during reactive sputtering

Target compound layer formation during reactive sputtering http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films CrossRef

Target compound layer formation during reactive sputtering

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , Volume 17 (4): 1827-1831 – Jul 1, 1999

Target compound layer formation during reactive sputtering

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , Volume 17 (4): 1827-1831 – Jul 1, 1999

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Publisher
CrossRef
ISSN
0734-2101
DOI
10.1116/1.581898
Publisher site
See Article on Publisher Site

Abstract

Journal

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and FilmsCrossRef

Published: Jul 1, 1999

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