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A Beginners' Guide to Scanning Electron MicroscopyContrast Formation in the SEM

A Beginners' Guide to Scanning Electron Microscopy: Contrast Formation in the SEM [An electron beam is rastered across the specimen surface resulting in the generation of secondary and backscattered electrons which are used to form images while x-rays are used to obtain elemental constitution of the specimen material. Present-day technology allows imaging of features as small as 1 nm in the SEM. The predominant use of the SEM is to generate SE and BSE images showing topographic and compositional contrast, respectively. This chapter deals with the mechanism of contrast formation, factors that affect its development, and how its interplay contributes to the appearance of various features observed in the images.] http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png

A Beginners' Guide to Scanning Electron MicroscopyContrast Formation in the SEM

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Publisher
Springer International Publishing
Copyright
© Springer Nature Switzerland AG 2018
ISBN
978-3-319-98481-0
Pages
77 –128
DOI
10.1007/978-3-319-98482-7_3
Publisher site
See Chapter on Publisher Site

Abstract

[An electron beam is rastered across the specimen surface resulting in the generation of secondary and backscattered electrons which are used to form images while x-rays are used to obtain elemental constitution of the specimen material. Present-day technology allows imaging of features as small as 1 nm in the SEM. The predominant use of the SEM is to generate SE and BSE images showing topographic and compositional contrast, respectively. This chapter deals with the mechanism of contrast formation, factors that affect its development, and how its interplay contributes to the appearance of various features observed in the images.]

Published: Oct 27, 2018

Keywords: Electron Backscatter (BSE); Secondary Electron (SE); SE Coefficient; Low Energy Beam; Topographic Contrast

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