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A Practical Guide to Surface MetrologyMultisensor – Systems – A Versatile Approach to Surface Metrology

A Practical Guide to Surface Metrology: Multisensor – Systems – A Versatile Approach to Surface... [The nature of technical relevant surfaces is often as complex as measurement of their properties cannot be carried out with a metrology tool with one or two specialized sensors. Instead, the industry increasingly looks for flexible and future-safe metrology tools that allow managing various measuring tasks or enable measuring various parameters of the same surface or workpiece.] http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png

A Practical Guide to Surface MetrologyMultisensor – Systems – A Versatile Approach to Surface Metrology

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Publisher
Springer International Publishing
Copyright
© Springer Nature Switzerland AG 2019
ISBN
978-3-030-29453-3
Pages
219 –222
DOI
10.1007/978-3-030-29454-0_7
Publisher site
See Chapter on Publisher Site

Abstract

[The nature of technical relevant surfaces is often as complex as measurement of their properties cannot be carried out with a metrology tool with one or two specialized sensors. Instead, the industry increasingly looks for flexible and future-safe metrology tools that allow managing various measuring tasks or enable measuring various parameters of the same surface or workpiece.]

Published: Jan 2, 2020

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